Oxygen Partial Pressure Dependency of Al-donor Solubility in ZnO

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J. Korean Ceram. Soc. > Volume 38(12); 2001 > Article

Journal of the Korean Ceramic Society 2001;38(12): 1093.

ZnO내 Al-도우너의 용해도의 산소분압 의존성

김은동, 김남균

한국전기연구원 전력반도체연구그룹

Oxygen Partial Pressure Dependency of Al-donor Solubility in ZnO

ABSTRACT

The Solid solution of A $l_2$ $O_3$ into ZnO can be defined by the substitution reaction of Al$^$3+/ ions into the Zn$^$2+/ sites of ZnO crystal lattice, the tetrahedral interstices composed of four neighbor oxygen ions in the wurtzite structure. Since the reaction either creates new zinc vacancies or consumes the oxygen vacancies, it should be in equilibrium with ZnO nonstoichiometry and disorder reactions. The relationships make oxygen partial pressure P$sub$o2/ control the concentrations of the vacancies and consequently limit the Al solubility in ZnO, [Al$sub$zn/]$sub$max/. This paper firstly reports with a refined model for defect quilibria in ZnO that the solubility decrease with the increase of P$sub$o2/, [Al$sub$zn/]$sub$max/ P$sub$o2/$^$-1/4/.

Key words: Zinc oxide, Aluminum donor, Solid solubility, Oxygen partial pressure