Preparation and Electrical Properties of <TEX>$YMnO_3$</TEX>Thin Film by MOCVD Method

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J. Korean Ceram. Soc. > Volume 38(5); 2001 > Article

Journal of the Korean Ceramic Society 2001;38(5): 474.

유기금속화학증착법에 의한 $YMnO_3$박막 제조 및 전기적 특성

김응수, 노승현, 김유택, 강승구, 심광보¹

경기대하교 재료공학과
¹한양대학교 세라믹공학과

Preparation and Electrical Properties of $YMnO_3$Thin Film by MOCVD Method

Key words: FeRAM, Ferroelectric, MOCVD, $YMnO_3$, Grain size

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