The growth of <TEX>${Ce_{1-x}}{RE_x}{O_{2-y}}$</TEX> Thin Films by RF Magnetron Sputtering

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J. Korean Ceram. Soc. > Volume 37(10); 2000 > Article

Journal of the Korean Ceramic Society 2000;37(10): 1014.

RF Magnetron sputtering을 이용한 ${Ce_{1-x}}{RE_x}{O_{2-y}}$ 박막성장

주성민, 김철진, 박병규¹

경상대학교 첨단소재연구소
¹서울산업대학교

The growth of ${Ce_{1-x}}{RE_x}{O_{2-y}}$ Thin Films by RF Magnetron Sputtering

Key words: Ceria, RF magnetron sputtering, Thin films, Preferred orientation

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