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Journal of the Korean Ceramic Society 1999;36(11): 1156. |
| 열처리 조건에 따른 $alpha-Fe_2O_3/SnO_2$계 박막형 가스센서의 제조 및 특성평가 |
| 김찬원, 심성은, 최성철 |
| 한양대학교 무리재료공학과 |
| Characterization of $alpha-Fe_2O_3/SnO_2$ Thin Gas Sensor Fabricated by Varying Annealing Conditions |
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| ABSTRACT |
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$alpha$-Fe2O3/SnO2 multi-layer thin films were fabricated by APCVD(Atmosperic Pressure Cehmical Vapour Deposition) and annealed at 40$0^{circ}C$ or 4 h, Diffusion of metal ions at the boundary of $alpha$-Fe2O3 and SnO2 layers was analyzed by SEM. EDS and XRD. The crystallite size of SnO2 was affected by the deposition temperature and time. The gas sensitivity (Rg/Ra) of $alpha$-Fe2O3/SnO2 multi-layer thin film gas sensor for NO gas contents of 100 ppm and 1000ppm was 6 and 14 respectively and the response time was 10 sec, The gas sensitivity of thin film gas sensor was improved by multi-layer process |
| Key words:
$\alpha-Fe_2O_3SnO_2$, Multi-layer, Thin film, Sensor |
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