Etching Characteristics of Er-doped Sodium Borosilicate Glass Film Fabricated by Aerosol Flame Deposition Method

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J. Korean Ceram. Soc. > Volume 36(9); 1999 > Article

Journal of the Korean Ceramic Society 1999;36(9): 946.

Aerosol Flame Deposition 법에 의해 제조된 Er 첨가 Soldium Borosilicate 유리박막의 식각 특성에 관한 연구

박강희, 정형곤¹, 이정우¹, 이형종¹, 박현수, 문종하²

전남대학교 세라믹공학과
¹전남대학교 물리학과
²전남대학교 신소재연구소

Etching Characteristics of Er-doped Sodium Borosilicate Glass Film Fabricated by Aerosol Flame Deposition Method

ABSTRACT

The etching characteristics of Er-doped sodium borosilicate glass film for the planar optical waveguides were investigated using reactive ion etching. The etch rate decreased as the pressure in creased but increased as the RF power increased. The etch rate increased as the flow rate C2F gas and the amount of O2 addition increased but decreased over critical point (C2F6 7,5 accm O2 20%) The etch rate was 180${AA}$/min under C2F6 7.5 sccm O2 20% RF power 270 W, pressure 150 mTorr. With this optimum etching condition and subsequent heat treatment at 975$^{circ}C$ for 30 minutes planar optical waveguides having improved sidewall roughness were fabricated successfully.

Key words: Planar optical waveguides, Er-doped sodium borosilicate, Reactive ion etching, Heat treatment