The Effect of H2 Flow Rate and TMS Concentration on Synthesizing Ultrafine <TEX>$beta$</TEX>-SiC Powder by Vapor Phase Reaction

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J. Korean Ceram. Soc. > Volume 36(8); 1999 > Article

Journal of the Korean Ceramic Society 1999;36(8): 853.

기상반응에 의한 $beta$-SiC 초미분말 합성시 수소 가스유량과 TMS 농도의 영향

유용호, 어경훈, 소명기

강원대학교 재료공학과

The Effect of H2 Flow Rate and TMS Concentration on Synthesizing Ultrafine $beta$-SiC Powder by Vapor Phase Reaction

ABSTRACT

To investigate the effect of H2 flow rate and TMS[Si(CH3)4] concentration on synthesizing ultrafine ${beta}$-SiC powder by vapor phase reaction the experiment was performed at 1100$^{circ}C$ of the reaction temperature under the condition of 200-2000 cc/min of H2 gas flow rate and 1-10% of TMS concentration respectively. The shape of ${beta}$-SiC particles synthesized was spherical and the size of particles decreased and the distribution of particles was more uniform with increasing H2 gas flow rate. In this case Si powders were coexisted with ${beta}$-SiC Pure and ultrafine ${beta}$-SiC powders without Si were obtained under the condition of above 2% of TMS concentration and below 1500 cc/min of H2 gas flow rate.

Key words: Ulrafine, ${\beta}$-SiC powder, TMS, Vapor phase reaction