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Journal of the Korean Ceramic Society
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J. Korean Ceram. Soc.
>
Volume 35(3); 1998
> Article
Journal of the Korean Ceramic Society 1998;35(3): 259.
MOS 소자에서 WSi
$_2$
게이트 전극이 Thin Oxide 성질에 미치는 영향
박진성
, 이현우
, 김갑식
1
, 문종하
2
, 이은구
조선대학교 재료공학과
1
영흥개발 부설연구소
2
전남대학교 무기재료공학과
Effect of WSi
$_2$
Gate Electrode on Thin Oxide Properties in MOS Device
Key words:
Thin oxide
,
WSi2 electrode
,
MOS device
,
Oxide reliability
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