Electrical Conductivity of Vacuum Evaporated Al Films on Glass

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J. Korean Ceram. Soc. > Volume 24(2); 1987 > Article

Journal of the Korean Ceramic Society 1987;24(2): 101.

유리표면에 진공증착된 Al박막의 전기전도성

김동호, 박현수¹, 정창주¹, 최석진¹

오리온 전기 개발부
¹전남대학교 공과대학 무기재료공학과

Electrical Conductivity of Vacuum Evaporated Al Films on Glass

ABSTRACT

The relative electrical conductivity of vacuum deposited Al films on a soda-lime(2947) and an alumino boro silicate(7809) glass was investigated with the variation of the relative humidity,temperature and film thickness. The structure and microstructure of Al films before and after exposure to the humidity wereexamined by the X-ray Diffractormenter(XRD) and Scanning Electron Microscope(SEM). As the relative humidity increased, the electrical conductivity of Al films on both glasses was decreased. However, the Al films on 7809 glass showed higher conductivity than that of 2947 glass under the same testing conditions. The decreasing of electrical conductivity was caused by the formation of Aluminum hydroxide which was made by the reaction between the aluminum films and water vapor.