| 침전법과 착체중합법을 이용한 Ga2O3 분말의 합성 및 결정구조 분석 |
| 정종열, 김상훈, 강은태1, 한규성, 김진호, 황광택, 조우석 |
한국세라믹기술원 이천분원
1국립경상대학교 공과대학 재료공학부 재료공학과 |
| Synthesis and Crystal Structure Characterization of Ga2O3 Powder by Precipitation and Polymerized Complex Methods |
| Jong-Yeol Jung, Sang-Hun Kim, Eun-Tae Kang1, Kyu-Sung Han, Jin-Ho Kim, Kwang-Teak Hwang, Woo-Seok Cho |
Icheon Branch, Korea Institute of Ceramic Engineering and Technology
1School of Nano and Advanced Materials Engineering, Gyeongsang National University |
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| ABSTRACT |
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Gallium oxide ($Ga_2O_3$) powders were synthesized using a precipitation method and a polymerized complex method. TG-DSC, SEM, and XRD were performed to investigate the phase and morphology of the $Ga_2O_3$. In situ high-temperature XRD analysis revealed the crystal structure of $Ga_2O_3$ at different temperatures. The $Ga_2O_3$ obtained using the precipitation method and polymerized complex method were generally spherical-shaped particles and their average particle size was approximately 80 nm and $1{mu}m$, respectively. The crystal structure of the $Ga_2O_3$ prepared by the precipitation method was changed from rhombohedral to monoclinic at $700^{circ}C$, while monoclinic $Ga_2O_3$ was obtained directly from the precursor by the polymerized complex method. |
| Key words:
Gallium oxide, Polymerized complex method, Precipitation method, High-temperature XRD, IGZO |
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