| 불소계 플라즈마에 노출된 Al2O3의 미세구조 변화 |
| 김대민, 이성민, 김성원, 김형태, 오윤석 |
| 요업(세라믹)기술원 이천분원 구조세라믹부 |
| Microstructural Changes of the Al2O3 Ceramics during the Exposure to Fluorine Plasma |
| Dae-Min Kim, Sung-Min Lee, Seong-Won Kim, Hyung-Tae Kim, Yoon-Suk Oh |
| Korea Institute of Ceramic Engineering and Technology(Icheon) |
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| ABSTRACT |
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Ceramics are widely used as plasma resistant materials in semiconductor industries. However, the plasma erosion resistance has not been properly evaluated in terms of microstructural changes during the exposure to plasma. In this study, microstructure developments of $Al_2O_3$ were investigated under the fluorine plasma conditions. In polycrystalline alumina, uniform erosion throughout the specimen as well as spatially distributed local erosion were observed. Local erosion was much more severe in lower purity alumina. In contrast to the polycrystalline alumina, only uniform erosion was observed in single crystalline sapphire. These specimens, however, had practically the same erosion depth, which results in the incorrectly similar plasma resistance. This implies that the plasma erosion resistance of ceramics should be evaluated in terms of the microstructural changes, as well as the conventionally accepted erosion depth. |
| Key words:
Plasma resistance, Fluorine plasma, Alumina |
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