| Sol-gel Self-patterning 기술을 이용한 광감응성 Sr0.9Bi2.1Ta2O9 박막의 제조기술에 관한 연구 |
| 양기호, 박태호, 임태영1, 오근호2, 김병호 |
고려대학교 재료공학과
1요업기술원
2한양대학교 세라믹공학과 |
| A Study on Fabrication of Photosensitive Sr0.9Bi2.1Ta2O9 Thin Film by Sol-gel Self-patterning Technique |
| Ki-Ho Yang, Tae-Ho Park, Tae-Young Lim1, Keon-Ho Auh2, Byong-Ho Kim |
Department of Materials Science and Engineering, Korea University
1Korea Institute of Ceramic Engineering and Technology
2Department of Ceramic Engineering, Hanyang University |
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| ABSTRACT |
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Self-patterning of thin films using photosensitive sol solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. In this study, ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$ thin films have been prepared by spin coating method using photosensitive sol solution. Strontium ethoxide, tertramethylheptanedionato bismuth and tantalum ethoxide were used as starting materials. As UV exposure time to the SBT thin film increased, the UV absorption peak intensity of metal ${beta}$-diketonate decreased due to reduced solubility by M-O-M bond formation. Solubility difference by UV irradiation on SBT thin film allows to obtain a fine patterning of thin film. Also, The ferroelectric properties of the UV irradiated SBT thin films were superior to those of the no-UV irradiated films. ﾖ⨀ |
| Key words:
Sol-gel process, SBT thin film, Self-patterning |
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