Journal of the Korean Ceramic Society

The Effect of Residual H₂Pressure on Gallium-doped ZnO Films Deposited by Magnetron Sputtering

Pung-Keun Song, Young-Jun Kwon, Jae-Min Cha, Byung-Chul Lee, Bong-Ki Ryu, Kwang-Ho Kim

J. Korean Ceram. Soc. 2002;39(10):928 DOI: https://doi.org/10.4191/kcers.2002.39.10.928

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Growth of Heteroepitaxial ZnO Thin Film by Off-axis RF Magnetron Sputtering

Journal of the Korean Ceramic Society.2003; 40(3): 262. CrossRef