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Effect of Recycling Time on Stability of Colloidal Silica Slurry and Removal Rate in Silicon Wafer Polishing
Eun-Suck Choi, So-Ik Bae
J. Korean Ceram. Soc.
2007;44(2):98
DOI:
https://doi.org/10.4191/kcers.2007.44.2.098
Cited By 1
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5