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Low Index Contrast Planar SiON Waveguides Deposited by PECVD
Yong-Tak Kim, Seok-Gyu Yoon, Dae-Ho Yoon
J. Korean Ceram. Soc.
2005;42(3):178
DOI:
https://doi.org/10.4191/kcers.2005.42.3.178
Cited By 1
SiON/SiO
2
Multilayer Deposited by PECVD for Low-Loss Waveguides
김용탁, 김동신, 윤대호
J. Korean Ceram. Soc.
2004;41(3):197
DOI:
https://doi.org/10.4191/kcers.2004.41.3.197
Refractive Index Control of
Silicon Oxynitride
Thick Films on Core Layer of Silica Optical Waveguide
김용탁, 조성민, 윤석규, 서용곤, 임영민, 윤대호
J. Korean Ceram. Soc.
2002;39(6):594
DOI:
https://doi.org/10.4191/kcers.2002.39.6.594
The Effect of RF Power and
$SiH_4$
/(
$N_2$
O+
$N_2$
) Ratio in Properties of SiON Thick Film for Silica Optical Waveguide
김용탁, 조성민, 서용곤, 임영민, 윤대호
J. Korean Ceram. Soc.
2001;38(12):1150
Thermal Characteristics of SiC Whisker Reinforced
$Al_2$
O
$_3$
-SiC Composite
김윤주, 나용한
J. Korean Ceram. Soc.
1998;35(1):1
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5
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