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Surface analysis of yttrium oxyfluoride deposited via air plasma spraying for Erosion resistance against NF
3
plasma
R. Kreethi, Yu-Jin Hwang, Ho-Young Lee, Jae-Hyuk Park, Kee-Ahn Lee
J. Korean Ceram. Soc.
2024;61(1):63-70. Published online October 6, 2023
DOI:
https://doi.org/10.1007/s43207-023-00332-2
Plasma‑resistant characteristics according to sintering conditions of CaO–Al
2
O
3
–SiO
2
glass coating layer
Yoon Sung Jung, Kyung Won Min, Jae Ho Choi, Ji Sob Yoon, Won Bin Im, Hyeong-Jun Kim
J. Korean Ceram. Soc.
2022;59(1):86-93. Published online January 31, 2022
DOI:
https://doi.org/10.1007/s43207-021-00149-x
Cited By 2
Plasma Resistance
Evaluation and Characteristics of Yttria Ceramics Sintered by Using Calcination Yttria
Jinsam Choi, Tadachika Nakayama, Won Tae Bae
J. Korean Ceram. Soc.
2013;50(5):348
DOI:
https://doi.org/10.4191/kcers.2013.50.5.348
Cited By 1
Plasma Resistance
and Etch Mechanism of High Purity SiC under Fluorocarbon Plasma
Mi-Ran Jang, Yeong-Kyeun Paek, Sung-Min Lee
J. Korean Ceram. Soc.
2012;49(4):328
DOI:
https://doi.org/10.4191/kcers.2012.49.4.328
Cited By 7
Phase Stability and Plasma Erosion Resistance of La-Gd-Y Rare-earth Oxide - Al
2
O
3
Ceramics
Kyeong-Beom Kim, Sung-Min Lee
J. Korean Ceram. Soc.
2010;47(6):540
DOI:
https://doi.org/10.4191/kcers.2010.47.6.540
Cited By 1
Erosion Behavior of YAG Ceramics under Fluorine Plasma and their XPS Analysis
Kyeong-Beom Kim, Dae-Min Kim, Jung-Ki Lee, Yoon-Suk Oh, Hyung-Tae Kim, Hyung-Sun Kim, Sung-Min Lee
J. Korean Ceram. Soc.
2009;46(5):456
DOI:
https://doi.org/10.4191/kcers.2009.46.5.456
Cited By 21
Plasma Resistance
s of Yttria Deposited by EB-PVD Method
Dae-Min Kim, So-Young Yoon, Kyeong-Beom Kim, Hui-Sik Kim, Yoon-Suk Oh, Sung-Min Lee
J. Korean Ceram. Soc.
2008;45(11):707
DOI:
https://doi.org/10.4191/kcers.2008.45.1.707
Cited By 14
Microstructural Changes of the Al
2
O
3
Ceramics during the Exposure to Fluorine Plasma
Dae-Min Kim, Sung-Min Lee, Seong-Won Kim, Hyung-Tae Kim, Yoon-Suk Oh
J. Korean Ceram. Soc.
2008;45(7):405
DOI:
https://doi.org/10.4191/kcers.2008.45.7.405
Cited By 10
1
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Materials Science, Ceramics - Q1
Journal Impact Factor 2.5
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