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Synthesis of Nanostructured Si Coatings by Hybrid Plasma-Particle Accelerating Impact Deposition (HP-PAID) and their Characterization
이형직, 권혁병, 정해경, 장성식, 윤상옥, 이형복, 이홍림
J. Korean Ceram. Soc. 2003;40(12):1202
DOI: https://doi.org/10.4191/kcers.2003.40.12.1202
      
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